Improvement of Vibro-Acoustic Belt Tension Monitoring in a Belt-Driven Automated Material Handling System
Friday, February 11, 2011 4:00 p.m. in ETC 4.120 Marcus Musselman Department of Mechanical Engineering The University of Texas at Austin http://www.me.utexas.edu Belt-driven automated material handling systems are ubiquitous in modern semiconductor manufacturing systems. The current vibro-acoustic technique used to monitor belt tension and misalignment yields low precision relative to the acceptable range of belt…