Design of an Optical Microelectromechanical-System Microphone Toward Sub-15 dBA Noise Floor
Friday, February 21, 2014 4:00 p.m. ETC 4.150 Donghwan Kim Department of Electrical and Computer Engineering Microelectronics Research Center The University of Texas at Austin https://www.mrc.utexas.edu Microelectromechanical-system (MEMS) microphones with optical readout have been previously demonstrated. These microphones are similar to capacitive MEMS microphones, but the optical microphone can achieve potentially higher signal-to-noise ratio. The…