Micromachined Optical Diffraction-Based Sound and Vibration Sensors
Monday, March 3, 2008 10:00 a.m. Dr. Neal A. Hall Micro-Audio, LLC Atlanta, Georgia This presentation will summarize recent developments with micromachined microphones employing diffraction-based optical displacement detection. The approach has the advantage of providing high-displacement detection resolution of the microphone diaphragm, independent of device size and capacitance, creating an unconstrained mechanical and acoustical design…