Micromachined Ultrasonic Sensors
Thursday, March 21, 2002 4:00 p.m. Professor Pierre Khuri-Yakub E.L. Ginzton Laboratory Stanford University http://www.stanford.edu/group/ginzton Stanford University With the advent of silicon micromachining, it is now possible to make capacitors with very thin gaps that sustain electric fields of the order of 109 V/ mor more. These capacitors can be made into transducers of ultrasound…