Piezoelectric PZT Films for Electromechanical Applications
Thursday, June 17, 1999 4:00 p.m. Dr. Qing-Ming Wang Lexmark International, Inc. Lexington, Kentucky http://www.lexmark.com The development of piezoelectric Pb(Ti 0.52 Zr 0.48 )O 3(PZT) thin films toward device miniaturization for microelectromechanical system (MEMS) applications depends largely on the processing capability of PZT film on silicon substrate, since the combination of PZT thin film with…