MEMS-Based Acoustic Arrays: Promise and Challenges
Wednesday, August 23, 2006 4:00 p.m. Professor M. Sheplak, Professor T. Nishida, and Professor L. N. Cattafesta Interdisciplinary Microsystems Group, Department of Electrical and Computer Engineering and Department of Mechanical and Aerospace Engineering, University of Florida at Gainesville http://www.img.ufl.edu A review of micro-electromechanical system (MEMS)-based directional acoustic array technology is presented. The prospects for reducing…